Offers for x-ray optics

Customer specific lamellar diffraction gratings on single-crystal silicon substrates are availbable for spectrometers and monochromators in the soft X-ray range. Due to stable substrates and advanced production technology they can be used with any kind of soft X-ray sources such as X-ray tubes, plasma pulse sources (PPL), high-harmonic generators (HHG), synchrotron radiation (SR) and free-electron lasers (FEL). The gratings are etched with a depth precision of < 1 nm. Several gratings individually optimized in depth and line density can be produced on the same substrate to fulfill special demands of the customer.

The gratings can be produced in different versions:

On planar substrates:

  • 1 – dimensional (1D), standard periodical linear grating with line density up to 5000 lines per mm,

  • 1-dimensional variable line space (1D VLS) gratings, with period variation up to 1000%

  • 2-dimensional variable line space (2D VLS) gratings, with period variation up to 1000% in sagittal and meridional direction.

  • 3-dimensional variable line space (3D VLS) gratings, with period variation up to 1000% and depth profile variation 5 nm – 100 nm in sagittal and meridional direction.

  • Reflection zone plates with line density up to 5000 lines per mm, with period variation up to 1000% and depth profile variation 5 nm – 100 nm in sagittal and meridional direction.

On spherical or toroidal substrates with minimum radius down to 4 m

  • 1 – dimensional (1D), standard periodical linear grating with line density up to 1200 lines per mm,

  • 1-dimensional variable line space (1D VLS) gratings, with period variation up to 1000%

  • 2-dimensional variable line space (2D VLS) gratings, with period variation up to 1000% in sagittal and meridional direction.

  • 3-dimensional variable line space (3D VLS) gratings, with period variation up to 1000% and depth profile variation 5 nm – 100 nm in sagittal and meridional direction.

  • Reflection zone plates with line density up to 1200 lines per mm, with period variation up to 1000% and depth profile variation 5 nm – 100 nm in sagittal and meridional direction.

All gratings are optimized with respect to profile depth, groove ratio and coating material. Efficiency measurements on a SR facility or a laboratory reflectometer are possible upon request. NOB GmbH partner, IAP e.V. provides also raytracing analysis of the customer optical layout with specification of overall efficiency, energy resolution and energy range of application.

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