Research grants, terminated
NOB took part in the following research projects:
1. REFLEX (2017 - 2019)
In this project we developed some of the technologies required for the industrial production of reflection zone plates (RZP).
A major focus was the successful development and commissioning of a special etching machine. This machine can now manufacture lithographic structures on a surface area of 200 mm x 400 mm to depths of some tens of nanometers with a resolution of one nm. Additionally, various depths can be etched at different parts of the surface and a depth gradient can be reached in a given area. The combination of precision in etching depth and its variation over the substrate surface makes it a unique machine.
Several other problems were solved like the determination of the limits of laser and e-beam lithography, the coating of RZPs and the quality control. Furthermore, a data base program developed within this project allows the control of the production process and the input of all relevant data of the produced RZPs.
The project enabled NOB to produce RZPs and to offer them on the market since 2020.
The project was co-financed by the European Fund for Regional Development (EFRE). (10162889)
"Das Projekt wurde kofinanziert durch den Europäischen Fond für regionale Entwicklung (EFRE)."
2. NeuGaR (New Generation of Aberration Reduced x-ray Optics) (2018-2020)
The project succeded in developing the technology and the necessary software for the production of wave front correcting optical elements which allow to compensate for the shape and figure errors of conventional optics.
The results are published in:
J. Probst, C. Braig, A. Erko, Flat Field Soft X-ray Spectrometry with Reflection Zone Plates on a Curved Substrate, Appl. Sci. (2020), 10, 7210
The project was co-financed by the Federal Ministry for Economic Affairs and Energy. (ZF4303903SY8)
3. WDSX (Wavelength dispersive x-ray spectrometer for soft x-rays 50 - 2.000 eV) (2019-2022)
We developed a compact spectrometer based on a reflective zone plate on a curved substrate. It can be used at scanning electron microscopes or electron probe micro analyzers to determine the elemental composition and the compounds of these atoms especially for light elements down to Li. The use of curved substrates instead of flat ones allows to increase the width of the dispersed and well focused energy range by one zone plate from a few per cent to +/- 50% of the design energy, thus spanning a factor three in energy.
The project was co-financed by the Federal Ministry for Economic Affairs and Energy. (ZF4303904SY9)
4. MOSFER (Modular Spectrometer with Femtosecond Resolution for Soft x-rays) (2020-2023)
We developed a modular spectrometer system, which uses laboratory pulsed X-ray sources as a laser plasma source and a high harmonic generator source allowing for a time resolution in the femtosecond range. Therefore, dynamics of molecules and clusters become accessible and electronic order phenomena in functional materials and their nanoscopic structure can be measured.
One main task of the project is the design and production of reflection zone plates on a curved substrate to reach a high energy resolution and light intensity. Other challenges are the monitoring of the sources and the automatic adjustment of several functional elements in the vacuum vessel.
The cooperation partners are the Max-Born-Institute, the Institute of Applied Photonics e. V. as well as the PREVAC GmbH.
The project was co-financed by the European Fund for Regional Development (EFRE). (10169200)
"Das Projekt wurde kofinanziert durch den Europäischen Fond für regionale Entwicklung (EFRE)."
5. COPYSPHÄR (Production Technologies for Replicated Strongly Bent Diffraction Optics with Nano Structures) (2020-2023)
A technology was developed for the replication of diffraction optics on curved substrates. Such optical systems combine the functions of a mirror and a grating and thus avoid losses. They cover a wide wavelength range from the infrared to soft x-rays and are used in spectrometers in many fields such as research, optical characterisation, geology, biology, agriculture, medical technology, etc. The market for diffraction optics has a size of about 200 Mio $.
The main problems which were solved in this project were the shrinkage of stamp and replica and the control of adhesion and separation in the various steps of the replication process.
The cooperation partners are the Technical University Berlin and the micro resist technology Gesellschaft für chemische Materialien spezieller Photoresistsysteme mbH.
The project was co-financed by the European Fund for Regional Development (EFRE). (10168775)
"Das Projekt wurde kofinanziert durch den Europäischen Fond für regionale Entwicklung (EFRE)."
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